The oil diffusion pumps and oil vapor jet pumps from leybold are ideally suited for industrial high vacuum applications. Silicone based diffusion pump oil 100 cc, same as dc705. Kt series oil diffusion pump oil diffusion pumpvacuum. For pump operation, the boiling point of the oil is not particularly important, but the thermal breakdown temperature may be. The measurements of the jet breakdown pressure of an oil diffusion pump have been taken in respect of the heat input, and those of the pumping speeds have been taken both in relation to heat input and forepressure, both for air and for hydrogen. Inland vacuums silicone diffusion pump oils invoil 702, 704, and 705 are durable fluids designed for a variety of high vacuum applications and for fast pumping large volumes of gas.
Diffusion pumps differ from conventional mechanical pumps in that they use a high speed jet of fluid to direct gas molecules in the pump throat down to the bottom of the pump and out the exhaust, which is usually called the foreline. Any air molecules that wander into the inlet meet the vapors are captured. To download drawing data and i o data, advance user registration free is required. The larger capacity pumps pbl06 pbl20 have the heaters directly immersed in the operating fluid for maximum thermal efficiency. When the oil view diffusion pump oil selection online becomes hot enough to vaporize, the oil vapors rise up the center of the pump and exit the nozzles at a downward angle.
Backstreaming of oil in the case of diffusion pumps pump without baffle approx. Even as turbomolecular vacuum pumps have displaced most small laboratory sized oil diffusion pumps these days because of perceived ease of use and cleanliness, most high vacuum heat treating furnaces still rely on a large oil diffusion pumps to generate the pressures below about 103 torr needed for many metal conditioning processes. Brochures vacuum pumps, systems and solutions leybold. General applications and accessories for oil diffusion pumps. At this point, the vacuum diffusion pump takes over to create a. After isolating the backing pump, the diffusion pump may be vented to atmosphere. Because of its simplicity, high performance and low initial cost, the diffusion pump is the primary industrial high vacuum pumping mechanism. Home services products catalogs downloads tech support about contact careers 505 8720037. The oil diffusion ejector pump consists of a pump body, heater and 3stage jet stack assembly. It can make the high vacuum pumping system with valves, watercooled baffle, pipelines, mechanical vacuum pump, etc, which can generate 102 pa104 pa working vacuum degree. Yet oil diffusion pumps require careful maintenance in order to sustain a high level of performance and maintain the integrity of the vacuum chamber. Oil diffusion pump ulvac has drawn on a wealth of experience in evacuation technology to redesign the oil diffusion pumps meeting the demands of a new era. We meet customers needs with various lineup including 4 to 52 inch for oil diffusion pump and 2 to 20 inch for oil diffusion ejector pump.
High vacuum pumps for stable vacuum in demanding applications. The pumping speed ranges from 2,400 ls to 33,000 ls and has a operating range of 101 to 107 mbar. Most modern diffusion pumps use silicone oil or polyphenyl ethers as the working fluid. Ideal vacuum diffusion pump oils, vacuum fluids, oils. The diffusion pump is the most common type of pump for use in high vacuum applications. Its vertical finned boiler and high power provide stable pumping and high helium pumping speed. Diffusion pump oil vacuum pump evp vacuum solution. The ax65 diffusion pump is a highperformance, aircooled pump designed with benchtop analytical instruments in mind. Oil diffusion ejector pumpy pbl series ulvacs oil diffusion pump has been used for many high vacuum equipments.
Please let me know if you have any suggestions on how to improve this to get it working. This article will explain practical steps that can be taken to ensure optimal performance of. Pdf viscosity and density of vacuum oils for diffusion pumps. Although its use has been mainly associated within the highvacuum range down to 10. In the diffusion pump with the same structure, if no. Oil diffusion pumps dij series leybold online shop.
The dij series of diffusion pumps is a 5stage oil diffusion pump with an improved gas throughput and stable high pressure in the range of 103 mbar. Oil vapor diffusion pumps it wasnt that long ago when you could walk into any vacuum laboratory and find a vapor diffusion pump on every system. Kt series oil diffusion vacuum pump are the equipment mainly used for getting the high vacuum 102 pa 105 pa condition. Agilent diffusion pumps offer high pumping speeds, high throughput, high tolerance. The development of the diffusion pump to attain ultra high vacua came about by concentrating on the elimination of contamination entering the vacuum system from the pump itself. Mt705 diffusion pump fluid is a colorless to light straw, a single component for ultrahigh vacua in the range of 10e9 to 10e10 torr untrapped and 10e11 torr trapped.
Agilent diffusion pumps offer high pumping speeds, high throughput, high tolerance forepressure, excellent backstreaming characteristics, low ultimate pressure, and longterm reliability. Maintenance and troubleshooting of oil diffusion pumps. The ulvac diffusion pumps have been designed for outstanding performance and extremely low running costs. Speed of oil diffusion pump do8001 with baffle and cod trap, pumping air 14 at the tate im d2, where mis the molecular weight. Oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable and very durable.
Since the chamber itself has no moving parts aside from the oil droplets, a vacuum. Oil vapour diffusion pumps vapour pumps for industrial applications edwards has long been a pioneer of vapour pumps and diffusion pump technology with innovations such as the diffusion pump cold cap and the combined diffusion pump, the diffstak. Edwardss range of high throughput diffusion pumps have many advantages in industrial applications. Using silicone based oil, there is little or no maintenance required, just several things. Vapor pressure as figure 1 shows, dow corning 705 diffusion pump fluid has extremely low vapor pressure. All agilent diffusion pumps, 704 silicone oil 1 gallon. When your process requires a pressure below that of a mechanical pump or mechanical pump and roots pump combination a.
This pump can be ordered with a cold cap or a dense baffle. Dow704 diffusion pump oil tetramethyl tetraphenyl trisiloxane is used in large and medium diffusion pumps for a wide range of research and production applications, as. Top components vacuum pump oil diffusion pump oil diffusion pumps ulk series. To ensure the satisfaction of our customers, our products are rigorously tested to ensure it reaches or exceeds all advertised specifications. Set of technical drawings on the design and construction of vacuum pumps, pumping machinery, and nuclear reactors. Diffusion pump maintenance guide diffusion pump oil by. These vapor jet pumps are one of the oldest and most reliable ways to create a vacuum. Performance of lion diffusion pump oil 11 corelationship between ultimate pressure temperature 1 pressure temperature relationship of lion diffusion pump oil a method. We specialize in offering high quality silicone diffusion pump oil backed by worldclass technical and customer support. Information about dow corning diffusion pump fluid dow.
On the pumping speed of oil diffusion pumps springerlink. The vapor pressure and backstreaming rate of mt705 diffusion pump fluid are low enough that the use of traps or refrigeration may not be necessary for all ultrahigh and ultraclean vacuum applications. Come with mechanism to stop flow of operating fluid to auxiliary pump. According to dayto 2 the tate of speeds for hydrogen and air for a pump may be various, depend. Oil backstreaming in turbomolecular and oil diffusion. Todays oil diffusion pumps have backstreaming rates comparable to those of turbomolecular pumps backed by. Silicone based diffusion pump oil 1 gallon, same as dc705. The pumping speed ranges from 2,400 ls to 33,000 ls and has a operating range of 101 to 107 mbar more. If faster cooling is desired, the pump can be cooled using the quick cool coil at the bottom of the diffusion pump. Instead, an ancillary mechanical roughing pump or forepump, capable of a modest level of pumping, first brings the pressure inside the vacuum diffusion chamber down to about 103 torr. The first designs of diffusion pumps go back to 1915, when the pump was invented by irving langmuir. As discussed in our article covering the difference between hydrocarbon based and silicone based diffusion pump oil, we generally recommend our customers use silicone based diffusion pump oil. Diffusion pumps use a high speed jet of vapor to direct gas molecules in the pump throat down. Vacuum diffusion pumps are one of the oldest and most reliable ways of creating a vacuum down to 1010 torr, or even lower, at 25 c.
Silicone based diffusion pump oil 500 cc, same as dc704. Depending on the type of diffusion pump oil you use, maintenance can be relatively simple to very time consuming. Oil apour diffusion pumps vapour pumps for industrial applications edwards has long been a pioneer of vapour pumps and diffusion pump technology with innovations such as the diffusion pump cold cap and the combined diffusion pump, the diffstak. This is a highly reliable ultrahigh vacuum pump with little pressure fluctuation even from bumping in the hydraulic oil.
Vhs4 diffusion pump x draft 8702 explosion operation of the diffusion pump without continuous evacuation below 0. The main reasons for their continued use are their longevity the lack of other options. Page 16 vhs4, vhs6 and vhs250 diffusion pumps explosion operation of the diffusion pump without continuous evacuation below 0. Vapor diffusion pumps were first conceived about 191516, and used mercury as the pumping fluid.
An oil diffusion pump is used to achieve higher vacuum lower pressure than is possible by use of positive displacement pumps alone. When the oil vapor hits the watercooled walls of the pump, the oil cools as it runs down. Dij oil diffusion pump advantages prolonged maintenance intervals, nonwearing, high safety standard. Operation, maintenance and troubleshooting of oil diffusion pumps oil diffusion pumps are still the most popular type of highvacuum pump because they. A gas bearing turbomolecular pump exhausting to atmosphere through a dynamic seal is the only type completely free of oil vapor backstreaming, regardless of operating time. The vapor pressure and backstreaming rate of dow corning 705 diffusion pump fluid are so low that use of traps or refrigeration is unnecessary for some ultrahigh. Oil diffusion pumps remain in popular use in the vacuum heat treating industry, possibly one of the few applications remaining for this type of high vacuum pump in the western world. A vacuum diffusion pump cannot begin its work with full atmospheric pressure inside the chamber.
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